77779193永利集团

Zihua Zhu:Time-of-Flight Secondary Ion Mass Spectrometry: a Unique Tool for Characterization of Ion Beam Modified Materials

发布日期:2016-04-25

报告题目:

Time-of-Flight Secondary Ion Mass Spectrometry: a Unique Tool for Characterization of Ion Beam Modified Materials

报告人:

Zihua Zhu

Senior Research Scientist, Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory

邀请人:

王雪林 教授

报告时间:

2014-04-08 14:00

报告地点:

77779193永利集团离子束报告厅

报告内容提示:

Rutherfordbackscattering (RBS) and other ion beam-related analysis techniques (e.g., elastic recoil detection analysis (ERDA) and nuclear reaction analysis (NRA)) have been among the most popular techniques to characterize the depth profile of implanted ions. However, RBS has several limitations. For example, (1) it is difficult to distinguish elements with similar masses (e.g.,90Zr in SrTiO3), and (2) it is hard to measure light elements in high mass matrix. Time-of-flight secondary ion mass spectrometry (ToF-SIMS) has been used in characterizing depth distribution of implanted ions for more than twenty years. Compared to RBS, ToF-SIMS has several unique advantages. First, ToF-SIMS can provide high mass resolution (M/DM > 10000), so mass interference is normally not a problem. Second, 10 microns depth profiling is feasible for ToF-SIMS, but RBS can only go 1-2 microns deep. In addition, depth resolution of ToF-SIMS can go down to sub-nanometer, and sensitivity of ToF-SIMS is approximately 1-3 orders of magnitude better than RBS (element dependent), which make ToF-SIMS one of the best tools for performing ultra-shallow depth profiling. The major drawback of ToF-SIMS depth profiling is quantification. Matrix effect makes SIMS quantification not straightforward. Therefore, ToF-SIMS and RBS can be regarded as complementary techniques in characterizing depth distribution of implanted ions. Interesting results have been demonstrated when combining these two analytical techniques. In this talk, several representative examples will be presented and discussed.

报告人简介:

Dr. Zhu has published 65+ peer review journal papers, and the total citation number is 800+, H-index = 15 (ISI 04/2014).

EDUCATION

2000/08-2005/12, The Pennsylvania State University, USA, Ph.D. in Analytical Chemistry.

1997/09-2000/07, Peking University, P.R. China, M.S. in Physical Chemistry.

1992/09-1997/07, Peking University, P.R. China, B.S. in Organic Chemistry.

WORK & RESEARCH EXPERIENCE

2006/03-Present, Scientist II & III, Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory

2000/08 – 2005/12, Research Assistant, The Pennsylvania State University

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